RWS Wafer Robot
FEATURES
- The advantage is on vertical integration of bothhardware and software, also using high precisionand stiffness DD motor, the repeatability can reach±0.1mm. Small circling radial and high utilizationof space.
- Applications include: Pick –and –place equipment inSemiconductor industry(pick-and place of wafer),Optoelectronics(mini panel, mini solar panel)andLED industry(sapphire substrate, rubber ring).
- Various options for end effectors such as vacuumtype, gripping type and flipping type. Able to providetotal solution to adapt to all kinds of customerapplications.
- Order guide
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